NexGEN MBE growth chamber for eBeam deposition of metals with Loadlock.
- - (Qty 2) Thermionics Lab Inc HM2 Series eGun TM, (2) 10cc crucibles with 8" OD CF mounted, (2) pneumatic shutters, (2) Water interlock switches, (1) 15kW switching e-Gun power supply, Gun controllers filament transformer & cables, (2) X-Y beam sweep controllers.
- - Flux Monitor Sigma EIES Guardian
- - Optitherm III optical fiber pyrometer 600C to 1500C
- - RHEED kSA 400 with 30eV power supply STAIB Gun computer control package with remote control box.
- - Veeco CAR 3" dual zone with heater, Power Supplies, Controller, Substrate rotation and angle to evaporation/loading
- - Atomic Hydrogen Source with automated valve positioner
- - (Qty 3) Chillers, One for sample & H+ source cooling, one for main chamber cooling, and one for chamber and E-Gun cooling
- - Leak Valve LVM940 (Lesker) high accuracy continuously adjustable from 10e-3 to 10e-11, with sample tank quick connection with vacuum connection
- - 2x PC's with installed software for various systems.
- - Equipment racks
- - Oxford Instruments Cryo-Plex 8, Diode, UHV with Burst Disc (new in 2014), currently holding system at 10-Kelvin.
- - Pfeiffer MVP 070-3 Diaphram vacuum pump, connected to loadlock.
- - Pfeiffer Mechanical-turbo pump DCU
- - Gamma Vacuum Ion pump, 150T, Titan DI, 6CFF. VAT valve to facilitate disconnection.
- - (Qty 2) MKS 999 Quattro
- - Extorr XT100 RGA with Vacuum Plus software
- - Granville-Phillips 350 Ionization Gauge & Controller
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