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NexGEN MBE growth chamber for eBeam deposition of metals with Loadlock.

System includes:

  • - (Qty 2) Thermionics Lab Inc HM2 Series eGun TM, (2) 10cc crucibles with 8" OD CF mounted, (2) pneumatic shutters, (2) Water interlock switches, (1) 15kW switching e-Gun power supply, Gun controllers filament transformer & cables, (2) X-Y beam sweep controllers.
  • - Flux Monitor Sigma EIES Guardian
  • - Optitherm III optical fiber pyrometer 600C to 1500C
  • - RHEED kSA 400 with 30eV power supply STAIB Gun computer control package with remote control box.
  • - Veeco CAR 3" dual zone with heater, Power Supplies, Controller, Substrate rotation and angle to evaporation/loading
  • - Atomic Hydrogen Source with automated valve positioner
  • - (Qty 3) Chillers, One for sample & H+ source cooling, one for main chamber cooling, and one for chamber and E-Gun cooling
  • - Leak Valve LVM940 (Lesker) high accuracy continuously adjustable from 10e-3 to 10e-11, with sample tank quick connection with vacuum connection
  • - 2x PC's with installed software for various systems.
  • - Equipment racks

Pumping:

  • - Oxford Instruments Cryo-Plex 8, Diode, UHV with Burst Disc (new in 2014), currently holding system at 10-Kelvin.
  • - Pfeiffer MVP 070-3 Diaphram vacuum pump, connected to loadlock.
  • - Pfeiffer Mechanical-turbo pump DCU
  • - Gamma Vacuum Ion pump, 150T, Titan DI, 6CFF. VAT valve to facilitate disconnection.

Metering:

  • - (Qty 2) MKS 999 Quattro
  • - Extorr XT100 RGA with Vacuum Plus software
  • - Granville-Phillips 350 Ionization Gauge & Controller

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Company Details
Target Technology Company
564 Wald
Irvine, California
92618
  • (949) 788-0909
  • (949) 788-0990
  • info@targettechnology.com
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